Integrated Systems

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Integrated Systems

Hine's Integrated Systems are tool automation solutions for many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor.
 
The Star Systems are automated load locks developed for pilot production and research and development environments. This Single Substrate Vacuum Transfer Systems can configure to automate many process applications. 

The Constellation Systems are Cassette-to-Cassette Vacuum Transfer System systems are the ideal tool automation solution for high volume production environments.  This cluster system can be easily customized to meet any OEMs’ needs.

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