Industrial Dry Pumps

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Industrial Dry Pumps


Dry Pump Catalog

LOT Vacuum Co. develops and manufactures Dry Vacuum Pumps for Industrial, Semiconductor, Flat Panel Display, Solar PV, and other demanding applications.  LOT pumps are qualified on over 35 OEM tool platforms.

Benefits of LOT DuraDry Series include minimal particle deposition via a short gas path, minimal process deposition via unique temperature control for heated or cooled rotors, and extended bearing life due to a split-flow design which cancels loads. In addition, seal life is extended with a non-contact piston ring labyrinth that is superior to typical shaft lip seals.  Energy saving was a key criteria of the design.

Service and applications support are provided by factory trained staff based at LOT Vacuum American in Austin, TX.

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